Ithagethi ye-Tantalum sputtering isetshenziswa kakhulu embonini ye-semiconductor kanye nomkhakha wokuhlanganisa optical.Senza ukucaciswa okuhlukahlukene kokuhlosiwe kwe-tantalum sputtering ngesicelo samakhasimende avela embonini ye-semiconductor kanye nemboni ye-optical ngokusebenzisa indlela yokuncibilikisa yesithando se-vacuum EB.Ngokuqaphela inqubo eyingqayizivele yokuginqika, ngokwelashwa okuyinkimbinkimbi kanye nezinga lokushisa elinembile le-annealing kanye nesikhathi, sikhiqiza ubukhulu obuhlukile bezinhloso ze-tantalum sputtering ezifana nethagethi yediski, okuqondiwe okungunxande kanye nezinhloso zokuzungeza.Ngaphezu kwalokho, siqinisekisa ukuthi ubumsulwa be-tantalum buphakathi kuka-99.95% kuya ku-99.99% noma ngaphezulu;usayizi wokusanhlamvu ungaphansi kwe-100um, ukucaba kungaphansi kuka-0.2mm kanye ne-Surface